LMSSA Clean Room Type
ISO class 2 cleanroom stage: ±2 µm accuracy with dust extraction ports
LMSSA Linear Motor Stages
LMSSA Single-Axis Linear Motor Stage
The LMSSA packages a linear motor, guideways, encoder and limit switches into one install-ready stage: 5 G acceleration, 5 m/s velocity, ±1 µm repeatability and ±2 µm accuracy with strokes from 100 to 2,700 mm. Five base widths from 80 to 206 mm run ironcore forcers for force density or ironless for 1% velocity ripple, single or dual forcers, in standard, high dustproof or ISO class 2 cleanroom covers. Encoders are embedded against environmental interference and every stage bought with a HIWIN drive ships error-mapped.
Building a wafer line? The Clean Room Type seals this same stage to ISO class 2 with dust-extraction ports and ±2 µm accuracy. View LMSSA Clean Room Type →
5 G
Maximum acceleration
5 m/s
Maximum velocity
±1 µm / ±2 µm
Repeatability / accuracy at the best encoder grades
Model codes read width, motor and force: LMSSA-13S200 is a 135 mm ironcore stage at 205 N continuous. Ironless (C) models trade force density for 1% velocity ripple at 10 mm/s. Dual forcers raise force on the same base.
| Model | Motor | Base width (mm) | Continuous force (N) | Peak force (N) | Configure |
|---|---|---|---|---|---|
| LMSSA-08S050 | Ironcore | 80 | 52 | 112 | Configure ↗ |
| LMSSA-08S100 | Ironcore | 80 | 104 | 224 | Configure ↗ |
| LMSSA-10S100 | Ironcore | 100 | 103 | 289 | Configure ↗ |
| LMSSA-10S200 | Ironcore | 100 | 205 | 579 | Configure ↗ |
| LMSSA-13S100 | Ironcore | 135 | 103 | 289 | Configure ↗ |
| LMSSA-13S200 | Ironcore | 135 | 205 | 579 | Configure ↗ |
| LMSSA-13S300 | Ironcore | 135 | 308 | 868 | Configure ↗ |
| LMSSA-18S100 | Ironcore | 185 | 103 | 289 | Configure ↗ |
| LMSSA-18S200 | Ironcore | 185 | 205 | 579 | Configure ↗ |
| LMSSA-18S300 | Ironcore | 185 | 308 | 868 | Configure ↗ |
| LMSSA-18C100 | Ironless | 185 | 75 | 300 | Configure ↗ |
| LMSSA-18C200 | Ironless | 185 | 150 | 600 | Configure ↗ |
| LMSSA-20S300 | Ironcore | 206 | 362 | 1,023 | Configure ↗ |
| LMSSA-20S500 | Ironcore | 206 | 544 | 1,535 | Configure ↗ |
| LMSSA-20S700 | Ironcore | 206 | 725 | 2,048 | Configure ↗ |
| LMSSA-20C100 | Ironless | 206 | 91 | 364 | Configure ↗ |
| LMSSA-20C200 | Ironless | 206 | 145 | 580 | Configure ↗ |
How a part number reads
LMSSA - 13 S 100 - 1 - 800 - G 5.3 A - S - S - A 0000
The configurator assembles this number for you, with drawings and 3D CAD. Configure ↗
Repeatability by encoder grade; absolute types run BiSS-C.
ISO class 2 cleanroom stage: ±2 µm accuracy with dust extraction ports
LMSSA Linear Motor Stages
Standard 2-axis cross table with cable management and optional theta axis
LMSSA Linear Motor Stages
Combinable cross-table stages: ±5 arc-sec orthogonality, ±0.001 mm repeatability
LMSSA Linear Motor Stages
Standardized gantry system: iron-core or coreless, aluminum bridge
LMSSA Linear Motor Stages
How buying works
HIWIN series are configured to your application, not bought off the shelf. Start from your loads and speeds if you are still choosing a size.
Rather talk it through? Request a quote from an application engineer.