Wafer inspection
Linear motor stages and NPS micro-stages scan and step with submicron repeatability so metrology sees the die, not the axis.
Semiconductor
Precision that holds at the nanometer.
Cleanroom-rated linear motor stages, dust-proof ballscrew modules, and micron-to-nanometer feedback for wafer processing, inspection, and lithography assist, from ISO class 2 front-end tools down to 100 nm micro-stages.
ISO class 2
LMSSA cleanroom stages, with vacuum ports for dust extraction
0.1 µm
Encoder resolution on LMSSA axes and NPS micro-stages
Class 1,000
KS and KU dust-proof ballscrew stages for semiconductor and LED tools
Applications
On the tools that print, inspect, and test the wafer.
From front-end cleanrooms to back-end die attach, HIWIN stages and components carry the motion that has to hold still at the nanometer.
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Lithography assist
Ironless linear motors and error-mapped drives keep cogging and following error out of the scan path.
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Die attach & pick-and-place
High-duty-cycle linear motor axes place dies and packages without accumulating placement drift over a shift.
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Wafer indexing
Direct-drive rotary motors couple the chuck with no gearbox: index accuracy under 2.5 arc-seconds, axial runout under 5 µm.
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Front-end cleanrooms
LMSSA cleanroom stages rate to ISO class 2; KS and KU covers hold class 1,000 so particles stay out of the process.
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Probe & test
Stiff, low-profile stages and magnetic encoder options keep probe cards on pad through high-throughput test.
Why HIWIN
A particle is a failed wafer. Vibration is a failed node.
Semiconductor processing keeps shrinking the circuit: wafer inspection, lithography assist, die attach, and probe all demand nanometer-class tracking and motion that does not shed particles into the process. Passive vibration control falls off at speed; cogging, backlash, and encoder error show up as yield.
HIWIN builds the axes those tools ride: LMSSA cleanroom stages rated to ISO class 2 with vacuum dust extraction, KS and KU ballscrew stages sealed to cleanroom class 1,000, stainless miniature guideways for measuring equipment, NPS micro-stages with 100 nm incremental motion, and direct-drive rotary motors that index under 2.5 arc-seconds. Ironless linear motors keep cogging out of the scan. Error mapping on HIWIN drives stores the compensation table on the drive itself.
Products
Cleanroom stages, sealed modules, and the feedback that closes the loop.
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Inspection · Lithography assist · Front-end
Linear Motor Stages
LMSSA axes to 5 G and 0.1 µm, with an ISO class 2 cleanroom variant and vacuum dust extraction for wafer environments.
Browse linear motor stages → -
LED examination · Medical and inspection
KK Series Ballscrew Stages
KS and KU dust-proof modules seal the drive to cleanroom class 1,000, so particles neither enter the rolling elements nor leave the stage.
Browse ballscrew stages → -
Measuring equipment · Compact axes
Linear Guideways
Stainless miniature rails and the tightest interchangeable accuracy classes, specified for measuring and semiconductor equipment.
Browse linear guideways → -
Wafer indexing · Rotary chucks
Direct Drive Motors
The load bolts to the rotor: no gearbox, no backlash. Index accuracy under 2.5 arc-seconds for semiconductor and 3C electronics.
Browse direct drive motors →
Researching a design? Download catalogs and application notes →
Application story
Holding a wafer-inspection scan inside a class 2 envelope.
A wafer-inspection builder needed a scan axis that would hold 0.1 µm resolution inside an ISO class 2 envelope, without commissioning a custom stage for every tool. Working with HIWIN application engineering, the team specified the LMSSA cleanroom variant: vacuum dust-extraction ports on a Ø8 air tube, an optical encoder at 0.1 µm, and a HIWIN drive that stores a 5,000-point error-mapping table on the drive itself. The same axis family covers the step-and-settle moves; NPS micro-stages handle the fine focus.
“We needed ISO class 2 and 0.1 µm on the same axis, without a custom stage. The LMSSA cleanroom variant showed up as a catalog part, error-mapped with the drive, and the particle counts held.”
ISO 2
Cleanroom class held with vacuum extraction
0.1 µm
Optical encoder resolution on the scan axis
5,000
Error-map points stored on the HIWIN drive
FAQ
Semiconductor motion control, answered.
Still weighing a design decision? Ask an application engineer →
What cleanroom ratings do HIWIN stages carry for semiconductor tools?
LMSSA cleanroom stages are suitable for ISO class 2 environments, with vacuum ports for dust extraction. KS and KU ballscrew stages use a stainless cover strip that qualifies the module for cleanroom class 1,000, so particles neither enter the rolling elements nor leave the stage.
When should a semiconductor tool use a linear motor stage instead of a ballscrew stage?
Linear motor stages are the choice for high dynamics, low velocity ripple, and the tightest following error: wafer inspection, lithography assist, and high-duty-cycle pick-and-place. Ironless motors further reduce cogging-induced vibration. KS and KU ballscrew stages remain the sealed, economical choice for class 1,000 axes that do not need 5 G.
Can HIWIN stages reach nanometer-class motion?
LMSSA axes resolve as low as 0.1 µm with optical encoders. NPS micro-stages deliver 100 nm incremental motion and submicron repeatability for metrology-grade positioning. Direct-drive rotary motors index under 2.5 arc-seconds with axial runout under 5 µm.
How is encoder error handled on semiconductor axes?
When the stage ships with a HIWIN drive, error mapping is performed before shipment. The D1 drive stores a 5,000-point compensation table on the drive itself and interpolates linear-axis encoder error, so following error stays short without a custom controller.
Does HIWIN supply complete motion sub-systems or only components?
Both. Specify a catalog stage (LMSSA, KS, NPS) with a matched drive, or build from guideways, ballscrews, encoders, and motors. Application engineers size the axis against payload, stroke, and cleanroom class.
Semiconductor