NPS Series
NPS Series Nano Precision Stage
- Type
- Nano precision stage, crossed roller guides
- Drive
- Ironless linear motor (L), AC servo ballscrew (AC)
- Stroke
- 50, 100 mm
- Resolution
- As low as 0.1 [µm]
The NPS delivers submicron repeatability and high stability ensuring precise linear movement, and comes in two versions: an AC servo stage driven by precision ground ballscrews and a direct-drive stage with an ironless linear motor. The stages are equipped with high-stiffness non-recirculating crossed roller guides and a precision machined base to ensure smooth motion, accurate motion control and high geometric accuracies. With precise motion and low servo jitter, this stage is ideal for small motion and stable applications.
-
100 nm
Minimum incremental motion (AC servo stage)
-
±0.2 µm
Bidirectional repeatability (linear motor stage)
-
0.1 µm
Standard linear encoder resolution
Applications
- Laser micromachining, marking and cutting
- Laser direct imaging
- Surface metrology
- AOI (automatic optical inspection)
Models
L models are direct-drive linear motor stages; AC models are AC servo ballscrew stages. The trailing digits are the stroke code (05 = 50 mm, 10 = 100 mm); a complete order number adds encoder, cable length and custom codes per the model explanation.
| Model | Drive | Stroke (mm) | Motor | Load capacity (kg) | Configure |
|---|---|---|---|---|---|
| NPS-L-UB1-05 | Linear motor | 50 | LMC-HUB1 | 10 | Configure ↗ |
| NPS-L-UB1-10 | Linear motor | 100 | LMC-HUB1 | 10 | Configure ↗ |
| NPS-L-UB2-05 | Linear motor | 50 | LMC-HUB2 | 20 | Configure ↗ |
| NPS-L-UB2-10 | Linear motor | 100 | LMC-HUB2 | 20 | Configure ↗ |
| NPS-L-CB4-05 | Linear motor | 50 | LMCB4 | 30 | Configure ↗ |
| NPS-L-CB4-10 | Linear motor | 100 | LMCB4 | 30 | Configure ↗ |
| NPS-L-CB6-05 | Linear motor | 50 | LMCB6 | 40 | Configure ↗ |
| NPS-L-CB6-10 | Linear motor | 100 | LMCB6 | 40 | Configure ↗ |
| NPS-L-CB8-05 | Linear motor | 50 | LMCB8 | 50 | Configure ↗ |
| NPS-L-CB8-10 | Linear motor | 100 | LMCB8 | 50 | Configure ↗ |
| NPS-AC-20-05 | AC servo ballscrew | 50 | 200 W | 25 | Configure ↗ |
| NPS-AC-20-10 | AC servo ballscrew | 100 | 200 W | 25 | Configure ↗ |
| NPS-AC-40-05 | AC servo ballscrew | 50 | 400 W | 40 | Configure ↗ |
| NPS-AC-40-10 | AC servo ballscrew | 100 | 400 W | 40 | Configure ↗ |
Part numbers & options
How a part number reads
NPS - L - UB1 - 05 A - 03 - C (AC servo stage: NPS - AC - 40B - 05 5 - 03 - C)
- NPS
- Series — Nano Precision Stage
- L
- Drive — L linear motor · AC AC servo motor
- UB1
- Motor type — L stages: UB1 LMC-HUB1 · UB2 LMC-HUB2 · CB4 LMCB4 · CB6 LMCB6 · CB8 LMCB8; AC stages: 20 200 W · 20B 200 W with brake · 40 400 W · 40B 400 W with brake
- 05
- Stroke — 05 50 mm · 10 100 mm
- A
- Encoder type — L stages: A optical analog 1 Vpp stainless scale · B optical analog 1 Vpp Invar scale · C optical digital 0.1 µm stainless scale (standard) · D optical digital 0.1 µm Invar scale; AC stages: 4 17-bit absolute · 5 13-bit less-wire incremental · 6 HIWIN 17-bit incremental
- 03
- Cable length — N no cable · 03 3 m · 05 5 m · 07 7 m
- C
- Custom code — none standard · C customized
The configurator assembles this number for you, with drawings and 3D CAD. Configure ↗
Linear encoder type (NPS-L)
Optical linear scales for the linear motor stage, selected by the encoder position in the order number.
- A Analog 1 Vpp Sin/Cos, stainless steel scale
- B Analog 1 Vpp Sin/Cos, Invar scale
- C Digital, 0.1 µm resolution, stainless steel scale — Standard
- D Digital, 0.1 µm resolution, Invar scale
Servo encoder type (NPS-AC)
Rotary encoders for the AC servo motor stage.
- 4 17-bit absolute encoder
- 5 13-bit less-wire incremental encoder
- 6 HIWIN 17-bit incremental encoder
Cable length
Both versions ship with the same cable options.
- N No cable
- 03 3 m
- 05 5 m
- 07 7 m
Related products
How buying works
Spec it in the configurator: drawings, 3D CAD, and a quote to follow.
HIWIN series are configured to your application, not bought off the shelf. Start from your loads and speeds if you are still choosing a size.
Rather talk it through? Request a quote from an application engineer.